Proses Teknologi Pembuatan Divais Sensor Gas CO Berbasis Timah Oksida (SnO2)

Slamet Widodo

Abstract


Dalam tulisan ini dibahas perancangan dan fabrikasi sensor gas berbasis timah oksida (SnO2) dengan teknologi film tebal (thick film technology). Sensor yang dirancang terdiri dari komponen-komponen penyusun, yaitu: pemanas (heater), elektroda (interdigital fingers), dan lapisan sensitif dari bahan timah oksida (SnO2). Sensor ini dibuat multilayer. Komponen heater dan dua buah elektroda telah dirancang dalam satu permukaan dengan mempertimbangkan aspek miniaturisasi, distribusi panas, dan konsumsi daya dari divais sensor. Proses pembuatan pemanas (heater) dan elektroda dilakukan di atas substrat alumina (Al2O3) dengan pasta silver/perak (Ag).

Kata kunci: Sensor gas; heater; elektroda; lapisan sensitif SnO2; thick film; substrat Al2O3

Abstract

This paper discribed the design and fabrication of tin oxide (SnO2) based gas sensors by thick-film technology. Sensors are designed consisting of constituent components as such as: heater, electrodes (interdigital fingers), and the sensitive layer of the tin oxide (SnO2) material. These sensors are made multilayers. Heater and two components have been designed in a single electrode surface by considering the aspects of miniaturization, heat distribution, and power consumption of sensor devices. The process of heater and the electrode on a substrate made of alumina (Al2O3) with silver paste (Ag).

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References


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